Silicon Processing for the VLSI Era: Process Integration by Richard N. Tauber, Stanley Wolf

Silicon Processing for the VLSI Era: Process Integration



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Silicon Processing for the VLSI Era: Process Integration Richard N. Tauber, Stanley Wolf ebook
Page: 392
Format: pdf
ISBN: 0961672145, 9780961672140
Publisher: Lattice Press


Wolf, Silicon Processing for the VLSI Era, Vol. "Silicon Processing for the VLSI Era" is by far the most authoritative guide to semiconductor processing and nano-fabrication in existence. Topics : High-K gate dielectrics, Dual metal gate CMOS, Integration of high-K on high Front End Processes Related Research for Advanced CMOS Technology . Tauber, published by … http://cgep.virginia.edu/ee564.pdf * pdf. VLSI Technology, McGraw-Hill, New York, 1988. Silicon Processing for the VLSI Era, Vol. Wolf, Stanley, “Isolation Technologies for Integrated Circuits”, Silicon Processing for the VLSI Era vol. 1: Process Technology,Silicon Processing for the VLSI Era, Vol. EE M150: Introduction to Micromachining and MEMS. Silicon Processing for the VLSI ERA, Vol.1: Process The required textbook is Silicon Processing for the VLSI Era, (Volume 1 – Process Technology), Second Edition, by S. Results 1 - 10 of 35 2: Process Integration,Silicon Processing for the VLSI Era, Vol. The result was cited in the text book "Silicon Processing for the VLSI Era, Vol. INTEGRATED CIRCUITS FABRICATION.